| EcoPeeler | pH | condition | W | WN | Th-SiO2 | TEOS-NSG | SiN (CVD) | LP-Sin non-anneal |
LP-Sin anneal |
DOPOS |
| KF1010 | 2.5 | 35°C 15min. | 0.30 | 1.10 | 0.00 | --- | --- | 0.00 | 0.00 | --- |
| 55°C 10min. | 0.70 | 2.30 | 0.20 | --- | --- | 0.06 | 0.07 | --- | ||
| 70°C 5min. | 1.50 | 5.20 | 0.00 | --- | --- | --- | --- | --- | ||
| KF5010 | 7.1 | 25°C 15min. | 0.00 | 0.04 | 0.00 | 0.00 | --- | 0.00 | 0.00 | 0.04 |
| 45°C 15min. | 0.03 | 0.10 | 0.00 | 0.00 | --- | 0.01 | 0.14 | 0.04 | ||
| 75°C 30min. | --- | --- | 0.57 | --- | 4.80 | 1.80 | 0.30 | --- | ||
| KF5015 | 7.1 | 25°C 15min. | 0.03 | 0.04 | 0.00 | 0.00 | --- | 0.00 | 0.00 | --- |
| 45°C 15min. | 0.04 | 0.10 | 0.00 | 0.00 | --- | 0.00 | 0.06 | --- | ||
| 75°C 30min. | --- | --- | 0.57 | --- | 4.20 | 2.30 | 0.80 | --- | ||
| KF5020 | 6.4 | 35°C 15min. | 0.03 | 0.05 | 0.00 | 0.00 | --- | 0.04 | 0.03 | 0.04 |
| 55°C 15min. | 0.04 | 0.10 | 0.00 | 0.00 | --- | 0.08 | 0.13 | 0.04 | ||
| 70°C 5min. | --- | --- | 0.07 | --- | 1.50 | 2.70 | 0.30 | --- | ||
| KF5025 | 6.4 | 35°C 15min. | 0.02 | 0.05 | 0.00 | 0.00 | --- | 0.04 | 0.02 | --- |
| 55°C 15min. | 0.05 | 0.10 | 0.00 | 0.00 | --- | 0.09 | 0.30 | --- | ||
| 70°C 5min. | --- | --- | --- | --- | 2.30 | 0.40 | --- | --- | ||
| KF6015 | 12 | 65°C 30min. | --- | --- | --- | --- | 2.40 | 1.90 | --- | --- |
| 75°C 30min. | --- | --- | --- | --- | 4.90 | 1.40 | --- | --- | ||
| 85°C 30min. | --- | --- | --- | --- | 4.90 | 2.50 | 0.20 | --- |
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